Site card
MA6 mask projection photolithography
Where:
Photonic and Biophotonic Optics Group (GOFB)
Ubicación:
Grupo de Óptica, Fotónica y Biofotónica, Centro de Tecnología Biomédica
Typology:
Equipamiento científico-Tecnológico
Manager: Miguel Holgado
Email:
MA6 lithography equipment, connectable to the SÜSS MA6 nanoimprinting system
Micro- and nano-manufacturing
Photolithography equipment for manufacturing micrometric and nanometric structures by means of mask projection
Manufacture of interferometric sensors at wafer level
